| 摘要 |
PURPOSE:To prevent drying irregularity and film thickness irregularity while prolonging the pot life of a coating solution, by moving a body to be coated relatively with respect to a container having the coating liquid received therein and a drying region and providing a means for supplying solvent vapor to the drying region. CONSTITUTION:A drum shaped base body is held in a coating container 3 having a coating solution 2 received therein by the support rod 9 pierced through said base body 1. A ring shaped container 20, which has a solvent 19 same to that of the coating solution 2 received therein, for regulating the concn. distribution solvent vapor is provided above the container 3 so as to be arranged to the periphery of the lower end region of a drying region 14. The base body 1 is drawn up from the coating solution 2 by raising an arm 8 having the support rod 9 fixed thereto and stopped in the drying zone 14 to perform drying. By this mechanism, the solvent 19 is evaporated into the drying zone 14 in such a state that the base body 1 is immersed in the coating solution 2. Therefore, the concn. of the solvent vapor in the drying region 14 is held to saturation vapor concn. or a value near thereto in the lower part and shows distribution gradually reduced toward the upper part.
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