摘要 |
PURPOSE:To save manhours or spectroscopic operation and to enhance efficiency by arranging an apparatus, which judges the presence of various elements based on the spectral angle data of the characteristic X rays of various elements stored in advance and the mesured data by the driving of an X-ray spectroscope, and outputting the result. CONSTITUTION:A spectral angle and its detected X-ray intensity are read by a spectral crystal 5 and an X-ray detector 6, which are driven by the commands from a control device 8. The data are stored in a memory device 7. The presence of a peak and its spectral angle are judged by the change in intensity of the detected X-rays in a judging and operating device 10. Then the spectral angle of the peak is compared with the spectral angle data of the characteristic X-rays of various elements, which are stored in a data memory device 9 in a comparing device 11. The judged result and the stored measured data in the device 7 are outputted to an output device 12. All of the devices 7, 9, 10, 11, and 12 are controlled by the device 8 and efficiently driven. Thus the analyzing operation can be performed automatically and efficiently. |