| 摘要 |
PURPOSE:To simplify the manufacture process of a surface filter by positioning comb-shaped electrodes at the uppermost part of a substrate and exposing lead- out electrodes. CONSTITUTION:Conductive films 6 and 6a are arranged on the glass substrate 1, and a piezoelectric film 4 is provided thereupon; and a dielectric film 5 is further formed thereupon and an electrode for surface acoustic wave excitation which has plural couples of positive and negative comb-shaped electrodes 2 and 3, and 2a and 3a is formed on it. The electrodes 2 and 3, and 2a and 3a are at the uppermost positions, and lead-out electrodes for inputting and outputting signals to and from those electrodes are exposed, so operation such as masking, etc., in the manufacture is unnecessary and the man-day is reduced. |
