| 摘要 |
PURPOSE:To obtain the titled fine particles, in high purity, by intorducing an oxygen-free raw material and a carrier gas into a reaction tube having an ampule attached to the bottom, carrying out the thermal reaction of the components, and depositing the produced fine particles of the chalcogenide glass in the ampule. CONSTITUTION:An oxygen-free organic metal compound containing chalcogen element [e.g. Ge(SC2H5)4] is introduced together with a high-purity carrier gas having lowest possible oxygen content into the reaction tube 12 made of a quartz glass, etc. from its top. The reaction tube 12 is furnished with a fusible ampule 24 attached to its bottom. The compound is heated and decomposed with the first heat source 21 attached at the top outer circumference of the reaction tube 12, to effect the deposition of the chalcogenide fine particles in the ampule 24 attached to the bottom of the tube. Furthermore, the unreacted material and the exhaust gas after the reaction, etc. are heated with the second heat source attached below the first heat source 21 to increase the vapor pressure of the components, and are discharged from the exhaust port 26. |
