| 摘要 |
PURPOSE:To attain the flow rate control over a wide range with a miniature controller by using a bimetallic diaphragm to the valve structure. CONSTITUTION:The flow rate of a path 1 is measured at a detecting part 2 and then compared with a set signal of a flow rate setting device 5 at a comparison/ control part 4. The input electric power to be applied to a heater 18 of a valve part 15 is controlled to control the flow rate. The part 15 contains a bimetallic diaphragm 17, the heater 18 which heats up the diaphragm 17, an orifice 16, etc. The temperature of the bimetal 17 is varied by controlling the input power to the heater 18. Thus the conductance of the orifice 16 is controlled by makig use of the bimetal characteristics where the displacement of the bimetal is varied by temperature. Thus it is possible to obtain a fixed flow rate. |
