MEASUREMENT APPARATUS, MEASUREMENT METHOD, AND CHARACTERISTIC MEASUREMENT UNIT

摘要

A measurement apparatus comprises an optical intensity information acquirer (40) for acquiring optical intensity information on a measured light containing a given band component and modulated by both an optical element included in an optical system (10) and a measured object (sample (100)), and an arithmetic processor (50) for calculating at least one of the matrix elements of a Mueller matrix representing the optical characteristic of the measured object according to the optical intensity information on the measured light and a theoretical formula of the optical intensity of the measured light. The optical intensity information acquirer (40) acquires optical intensity information on a plurality of measured lights obtained in the optical system (10), at least one optical element of which has a major-axis orientation different from the others. The arithmetic processor (50) performs a carrier amplitude coefficient calculation and a matrix element calculation for calculating at least one matrix element according to a carrier amplitude coefficient and a theoretical formula of the carrier amplitude coefficient containing at least one matrix element.