发明名称 SAMPLE TRANSFER DEVICE FOR ELECTRON RAY EQUIPMENT
摘要 PURPOSE:To perform accurate movement of a sample by installing a joint member which is pivotally connected to a sample holder and which rotates in the direction of the rotation of the sample holder while bringing the curved surface of the joint member into contact with the inner surface of a driving member. CONSTITUTION:A cylindrical slant body 2 is rotatably inserted in the tube 1 of an electron microscope which forms an electron ray path 30. A support cylinder 4 having a spherical section 3 at its end is rotatably inserted in the slant body 2. A sample holder 5 is movably inserted in the support cylinder 4 in such a manner that their central axes coincide with each other. The end of the holder 5 is placed between the upper magnetic pole and the lower magnetic pole 6 of an objective. A sample 7 is placed on an area of the holder 5 which intersects with optical axis (Z). Between the holder 5 and a driving member 31 attached to the tube 1, a rotary body used as a joint member 32 is installed. The pivotal surface 32b of the member 32 is connected to the holder 5. The arc-like curved surface 32a of the member 32 touches the inner flat surface 31a of the member 31. Owing to the above constitution, it is possible to achieve the accuracy of the movement of the sample within a horizontal surface.
申请公布号 JPS60105151(A) 申请公布日期 1985.06.10
申请号 JP19830209933 申请日期 1983.11.10
申请人 KOKUSAI SEIKOU:KK 发明人 SUZUKI SHIGERU
分类号 G21K5/04;G21K5/10;H01J37/20 主分类号 G21K5/04
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