| 摘要 |
PURPOSE:To pass and detect only the secondary electrons with specific energy by providing a Wien filter that intersects and applies a deflection electric field and a deflection magnetic field following a detector that detects the secondary electrons from a sample. CONSTITUTION:A sample 3 is irradiated with charged particle beams 1 tapered by a lens 2 and the secondary electrons are detected by a detector 6. In this case, a Wien filter that generates an electric field E and an magnetic field B by intersecting a deflection plate 13 and a deflection coil 14 is provided following a detector 16 and detects only the secondary electrons with specific energy through a diaphragm 15 by extracting the secondary electrons 51-53 from the sample 3 using a mesh 11 and making them incident on the filter. As a result, if a bandpass filter is provided, the resolution of secondary electron pictures can be improved and the cross-sectional pictures in the sample depth direction from a secondary electron generation mechanism can also be observed.
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