摘要 |
PURPOSE:To couple an element in series at the side end without shortcircuiting by forming a contact for electrically coupling at the side of the first electrode via a conductor lead extended from the second electrode by utilizing the second opened groove formed inside. CONSTITUTION:The second opened groove 18 is formed, and the sides 8, 9 of the first electrode are exposed. Further, part of the first electrode 37 of the first element is allowed to remain on the left side 9 of the second opened groove 18. If such a remaining region does not exist, the vicinity of the groove is deteriorated in the insulation due to laser annealed polycrystalline semiconductor due to high heat (-2,000 deg.C) of the laser light. Since this polycrystal is remarkably generated on the surface of a glass substrate, this crystallization is prevented by the projection 9, thereby preventing sides 9, 16 from electrically shortcircuiting. In other words, the same second electrode of the element as the first electrode 39 can be prevented from shortcircuiting. |