发明名称 |
Method for determining the integrity of passivant coverage over rectifying junctions in semiconductor devices |
摘要 |
A semiconductor device having a rectifying junction after passivation is exposed to a humid ambient while being tested for humidity-induced leakage currents indicative of passivant defects such as pinholes, cracks, etc. The amplitude of the reverse biased humidity-induced current is indicative of the integrity of the passivant coverage.
|
申请公布号 |
US4520312(A) |
申请公布日期 |
1985.05.28 |
申请号 |
US19820438931 |
申请日期 |
1982.11.03 |
申请人 |
RCA CORPORATION |
发明人 |
TARNG, MING L.;ROMITO, WILLIAM S. |
分类号 |
G01R31/12;G01R31/26;(IPC1-7):G01R31/02 |
主分类号 |
G01R31/12 |
代理机构 |
|
代理人 |
|
主权项 |
|
地址 |
|