| 摘要 |
PURPOSE:To intensify the output of a detecting element to improve the measurement precision by setting the shape, the quality, and the structure of a carrier plate to prescribed modes. CONSTITUTION:A carrier plate 9 is formed with materials having a high heat conductivity, and the plate 9 has a shape asymmetrical in the flow direction of a fluid with a semiconductor flow rate detecting element 4, which is fixed to the plate 9, as the center. Consequently, radiation with the element 4 as the center is asymmetrical, and the linearity is improved, and the output of the element is intensified. |
