| 摘要 |
PURPOSE:To enable checking of whether a reticle is correct or not at every exposure of a reticle pattern by drawing the information for identifying the reticle at the optional point in the region corresponding to a chip and forming the light transmission part for erasing said information recorded already in the form of a latent image on a mask formable resist film into a stripe region. CONSTITUTION:Whether the set reticle coincides with the desired reticle or not can be checked at every exposure by writing information (a) for identifying the reticle into a region 2 corresponding to a chip. A light transmission part (c) is further formed in a part of a stripe region 3 and therefore one of the information (a) recorded already in the form of a latent image on the resist film on a mask blank 5 can be erased in the stage of exposure. More specifically, the information (a) having the shape of said latent image is cured not yet but is cured by exposure through the part (c) by which said information is made into the same state as the part of the region 2 except the pattern. |
