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发明名称
EXPOSURE MASK AND METHOD FOR PRODUCING DIFFERENT-PERIOD DIFFRACTION GRATING PATTERN
摘要
申请公布号
JPS6091302(A)
申请公布日期
1985.05.22
申请号
JP19830200405
申请日期
1983.10.26
申请人
NIPPON DENKI KK
发明人
KAEDE KAZUHISA
分类号
G02B5/18;H01L21/30;H01S5/00
主分类号
G02B5/18
代理机构
代理人
主权项
地址
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