| 摘要 |
Method and apparatus are disclosed for coating substrates with a film polymer based on p-xylylene by vapor-phase polymerization. The apparatus monitors the monomer vapor pressure after pyrolization of the cyclic di-p-xylylene dimer, compares the measured pressure to a predetermined pressure needed to effect a completed vapor-phase polymerization reaction, and adjusts the temperature of vaporization in response to variations between measured pressure and the predetermined pressure.
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