| 摘要 |
As a stripper for a radiosensitive resist formed of a poly(fluoroalkyl alpha -haloacrylate) or a copolymer thereof, there is used a solution which contains 0.1 to 40 wt. % of an alkali metal alkoxide, an alkali metal hydroxide or a tetraalkylammonium hydroxide in a substantially non-aqueous polar solvent of dimethyl sulfoxide.
|
