| 摘要 |
<p>PURPOSE:To obtain a lead titanate PbTiO3 thin film having excellent crystal performance and C axis orientation without using expensive single crystal substrate like magnesium oxide by using a substrate on which gratings are formed. CONSTITUTION:The grating 7 is formed on a quartz substrate 6 and it is coated with an electrode material. In forming the lead titanate PbTiO3 thin film on the substrate 6, the C axis orientation is obtained at a part A where the grating exists and polycrystalline film is obtained at a part B where no grating exists. In applying polarization processing through the vapor-deposition of an upper electrode 8 onto the part A subject to the C axis orientation, only the part A is active for piezoelectricity. In forming the element like this, an array transducer where each element is activated independently is formed.</p> |
