发明名称 SEMICONDUCTOR CHIP TEST CLASSIFICATION METHOD
摘要 PURPOSE:To curtail the time required from test to classification by moving the upper part measuring needle after the measurement for test on the case in accordance with classification together with the chip attracted thereto. CONSTITUTION:The upper part measuring needle 10 is moved downward from above the chip 2 to be measured until it is placed in contact with said chip. Thereby, an attracting force is applied on the chip 2. Under this condition, the lower part measuring needle 3 is moved upward and the chip 2 is also moved upward. Thereby, the chip 2 is separated from the expand tape, simultaneously the measuring needle 10 also moves upward and the chip 2 is held by the measuring needles 3, 10 and is floated in the space. Under this condition, a voltage is applied between the measuring needles 3, 10 and predetermined tests are carried out. When such measurement is completed, only the measuring needle 3 is moved downward up to the original position. Even after the needle 3 is moved downward, the chip 2 is still attracted by the measuring needle 10. Under this condition, the holder 11 moves horizontally and the chip 2 reaches the upper part of predetermined classification case 16 in accordance with the result of measurement. The attracting force of measuring needle 3 is released and the chip 2 is accomodated. Thereby, the time required from test to classification can be curtailed.
申请公布号 JPS6089938(A) 申请公布日期 1985.05.20
申请号 JP19830198713 申请日期 1983.10.24
申请人 ROOMU KK 发明人 ITANI SHIGERU
分类号 H01L21/66;H01L21/677;(IPC1-7):H01L21/66 主分类号 H01L21/66
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