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发明名称
ION IMPLANTATION PROCESS FOR COMPOUND SEMICONDUCTOR
摘要
申请公布号
EP0111085(A3)
申请公布日期
1985.05.15
申请号
EP19830109941
申请日期
1983.10.05
申请人
INTERNATIONAL BUSINESS MACHINES CORPORATION
发明人
HODGSON, RODNEY TREVOR;JACKSON, THOMAS NELSON;RUPPRECHT, HANS STEPHAN;WOODALL, JERRY MACPHERSON
分类号
C30B29/40;C30B31/22;H01L21/265;H01L21/314;H01L21/324;(IPC1-7):H01L21/265
主分类号
C30B29/40
代理机构
代理人
主权项
地址
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