| 摘要 |
PURPOSE:To improve high photosensitivity, high dark resistance and adhesion of laminated body to supporter by a method wherein carbon atoms are distributed at specified concentration to a laminated body of an amorphous Si layer containing Ge and another photoconductive Si layer. CONSTITUTION:A photoreceptor layer 102 comprising the first layer region 103 consisting of a-Ge(Si,H,X) and the second photoconductive layer region 104 consisting of a-Si(H,X) is successively laminated to compose a layer structure from a supporter 101 side. The content of carbon atoms contained in the layer region C in relatively decreased to maintain the high photosensitivity while relatively increased to prevent any electric charge input from free surface of a photoreceptor layer 102 from happening also to secure reinforced adhesion of laminated body by supporter. In order to simulatneously attain to said three purposes, the carbon atoms must be distributed at relatively high concentration on the supporter side while at high ratio in the layer region C. |
