| 摘要 |
PURPOSE:To provide a titled evaporating cylinder which can maintain a specified rate of evaporation and performs evaporation with good reproducibility by the constitution in which the inside of the cylinder is formed in a stair shape by many sheets of perforated plates having many holes of suitable diameters and a carrier gas is passed by said plates. CONSTITUTION:A cylindrical hermetic vessel 1 constituting the outside wall of the above-described cylinder is provided with an introducing pipe 4 for a carrier gas 5 and a gas discharge part 8 for discharging a supply gas 6. The inside of the vessel is partitioned at a specified interval to many stories by disc-shaped perforated plates 2 having many holes 3 and solid source powder 7 is sprayed on the plates 2. Each plate 2 is a stainless steel disk having holes 3 of 1-5mm. diameter and the diameter thereof is 1- several 10cm and the thickness 0.1-2mm.. MoCl3, WCl5, etc. are enumerated as the powder 7 and the grain size is several - several 10mu. H2, N2, etc. are adequate as the gas 5. The evaporating cylinder which can maintain the specified evaporation of the solid source and can provide good reproducibility is obtd. and the supply of the material to CVD is made smooth according to this invention. |
