| 摘要 |
PURPOSE:To always stabilize electrical and optical photoconductive characteristics by forming a layer region containing oxygen atoms in irregularly distributed state in thicknesswise direction in the first amorphous layer. CONSTITUTION:A photoconductive member 100 has the first layer 102 having photoconductivity made of a-SiGe(H,X) and the second layer 103 on a support 102 as a photoconductive member. The germanium atoms contained in the layer 102 are distributed continuously uniformly in planar direction parallel to the thicknesswise direction of the layer 102 and the surface of the support 101 contained in the layer 102. In the photoconductive member, to improve the high photosensitivity and high dark resistance, and further the adherence between the support 101 and the layer 102, oxygen atoms are contained in the layer 102. The oxygen atoms contained in the layer 102 may be contained entirely in irregularly distributed state in thicknesswise direction in the entire layer region of the layer 102, or may be contained only in the layer region of the part of the layer 102 irregularly. |
