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发明名称
PLASMA CHEMICAL VAPOUR DEPOSITION APPARATUS
摘要
申请公布号
GB8506478(D0)
申请公布日期
1985.04.17
申请号
GB19850006478
申请日期
1985.03.13
申请人
SHARP KK
发明人
分类号
C23C16/50;C23C16/509;G03G5/08;G03G5/082;H01J37/32
主分类号
C23C16/50
代理机构
代理人
主权项
地址
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