| 摘要 |
PURPOSE:To obtain a target capable of displaying extremely excellent film characteristics when forming a molybdenum film or an LSI electrode by each bringing alkali metal content and radioactive element content to specific values. CONSTITUTION:High-purity metal molybdenum, alkali metal content thereof is 100ppb or less and radioactive element content thereof is 10ppb or less, or a mixture of said molybdenum and high-purity silicon is used. A metal molybdenum or a molybdenum compound is dissolved to from an aqueous solution containing molybdenum, the aqueous solution is purified, and a crystal containing molybdenum is crystallized. The crystal is separated into a solid and a solution, washed and dried, and heated and reduced, thus preparing high-purity molybdenum powder. The powder is pressure-molded, sintered and dissolved to prepare high-purity molybdenum ingot, and the ingot is plastically processed and machined, thus manufacturing said high- purity target. |
