| 摘要 |
PURPOSE:To eliminate chuck interruption with even distribution of sample chucking force on the surface by applying a pressure on surface plates on both sides of a sample with a pair of arm tips on a reverse gripping chuck vertically divided into two. CONSTITUTION:Arms 12' and 12'' are provided on both outsides of a chuck frame 10 and arm tips 14, 16, 18, and 20 are provided in such a manner as to be free to rotate by a fine angle with support shafts 14', 14'', 16', 16'', 18', 18'', 20' and 20''. Each arm tip is set at the center of a chuck 10 in the direction opposite to that of the displacement of a sample 21, namely, reversely and slantly in parallel. The surface plates 22' and 22' of the sample are supported with the upper end support shafts 14', 16', 18' and 20' in such a manner to rotate by an angle of alpha. A reinforcing wall 24 is provided on the back of the chuck 10 to support the arms 12' and 12'' at a fixed space thereby maintaining the lower end shafts 14'', 16'', 18'' and 20'' of each arm tip at a fixed space. The upper ends 14', 16', 18' and 20' are lowered as the sample is pulled down and the arm tip is displaced horizontally. This increasing chucking pressure evenly on the surface with respect to the sample thereby checking the interruption of the chucking. |
