PREPARATION OF LIQUID CRYSTAL CELL

摘要

PURPOSE:To make a driving circuit simple by injecting an ion in a range of about 0.1mum in width by a focusing ion beam apparatus followed by heat- treating so as to reveal a non-linear resisting characteristics. CONSTITUTION:A Cr layer is formed on a plane substrate composed of a borosilicate glass followed by performing a fine working with a wet-etching method to form a bus.bar electrode layer 2. And then, the ITO layer is formed by a magnetron high frequency sputtering method followed by performing the fine working with the wet-etching method to form a picture element electrode layer 3 and a connecting electrode layer 4. Then, the Al ion is injected in a part 5 by scanning the Al ion beam using a liquid Al metal ionic source, an accelerating voltage of 30Kv and a dose amount of 2X10<14>cm<-2>. Further the substrate is heat-treated in an air at a temp. of about 450 deg.C for 30min whereby the layer 5 displayes a non-linear resisting characteristics.