发明名称 CELL FOR MOLECULAR BEAM SOURCE
摘要 PURPOSE:To produce an MBE film having high reproducibility and excellent uniformity of film thickness, by constituting a cell with a tubular body and with a source material container such that they can be inserted to each other with an adjustable depth of insertion for forming a constant molecular radiation pattern. CONSTITUTION:A cell comprises a cell enveloping tube 10 and a cell body 11 both made of pyrolytic boron nitride. A source material 12 is introduced into the cell body 11, and its top surface 13 goes down in the cell body 11 with the progress of evaporation. The lowering of the surface level is compensated by rotating the external thread 34 to press the cell body 11 upwards into the cell enveloping tube 10. In such a manner, the distance l from the inlet A of the cell to the liquid level of the source material can be kept constant.
申请公布号 JPS6063918(A) 申请公布日期 1985.04.12
申请号 JP19830172799 申请日期 1983.09.17
申请人 NICHIDEN ANELVA KK 发明人 MURAKAMI SHIYUNICHI;ISHIDA TETSUO;SAKAI SUMIO
分类号 C30B23/08;H01L21/203 主分类号 C30B23/08
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