DEVICE FOR EPITAXIALLY PROVIDING A LAYER OF SEMICONDUCTOR MATERIAL

摘要

A liquid-phase epitaxial growth device has a reservoir holder; a slider that is movably mounted below the reservoir holder to enable each reservoir to be selectively uncovered, thus allowing semiconductor melt in each reservoir to pass through each aperture in the slider; a movable substrate holder for receiving one or more semiconductor substrates that are placeable below each aperture; and a member for receiving semiconductor melt from each aperture when it is uncovered by movement of the substrate holder. A locking mechanism enables the slider to be locked to the reservoir holder at one or more substantially fixed positions.