| 摘要 |
PURPOSE:To make it possible to measure the degree of infiltration of water accurately even though the amount of water is minute, by immersing a resin sealed semiconductor element in a specified aqueous solution, separating the semiconductor element and the resin with a lead surface as a boundary, and detecting the penetrated positions of the elements in the solution by an X ray microanalyzer. CONSTITUTION:A resin sealed semiconductor element is immersed in an aqueous solution, wherein elements (such as K, Cd, Cs, Mn, In, Tl, Sr, and Nb) that are not included in the resin are dissolved. Thereafter the semiconductor element and the resin are separated with the lead surface as a boundary. The penetrated positions of the elements in the solution are detected by an X ray microanalyzer. Thus the degree of the infiltration of water is accurately measured even though the amount of water is minute. |
