| 摘要 |
PURPOSE:To facilitate assembling work by forming the static vane and spacer ring integrally while to reduce the size and weight by making thin the side face section in casing. CONSTITUTION:A tubular section 5c and a spigot section 5d are formed through press work on a static vane 5 then a vane section 5e is formed. When assembling, each static vane 5 is lapped sequentially with respect to the rotor to joint the spigot section 5d on one static vane 5 and the tubular section 5' on other static vane 5'. Consequently, the outercircumferential section of static vane 5 can be made quite thin resulting in reduction of the diameter of casing for turbo molecular pump. |
