PATTERN INSPECTING APPARATUS

摘要

PURPOSE:To attain to enhance the reliability in inspection, by preliminarily storing the detection signal of the pattern of a comparing object in memory and comparing the detection signal of a pattern to be inspected with the content of the memory. CONSTITUTION:A specimen 1 is moved to a direction at right angles to a linear image sensor scanning direction by an X-Y table 8 to detect a two-dimensional pattern. The output of a linear image sensor 5a is binarized by a binarizing circuit 6a. The output of this binarizing circuit 6a is divided into two and one of them is inputted to a discriminating circuit 7 while the other one is inputted to a shift register 9. The output of the shift register 9 is inputted to the discriminating circuit 7 and compared with the output of the binarizing circuit 6a to perform discrimination and a non-coincidence part is judged as a defect.