发明名称 INFRARED RAY HEATING METHOD
摘要 PURPOSE:To enable to perform an annealing process on both sides of the material to be heated simultaneously by heating both sides of the material to be heated at different temperatures by a method wherein a device for adjustment of supplied electric energy is provided independently on the infrared ray heating lamps which are opposingly arranged on the front and back sides of the material to be heated. CONSTITUTION:The programed power sent from a common power source 9 is supplied to power controllers 13a and 13b through power ratio setting devices 14a and 14b, and each lamp 6 of infrared ray lamp groups 8a and 8b is lighted up using the power set for each lamp group by the setting devices 14a and 14b. The setting devices 14a and 14b output the power W1 of W0Xx% (x=0-100) and the power W2 of W0Xy% (y=0-100) by independently and selectively setting the inputted common power W0 within the range of 0-100%. The power ratio set values (x) and (y) are determined by manual operation performed from outside. As a result, workability is improved due to reduction in annealing manhours, and the improvement in quality can also be contrived by performing an annealing simultaneously on the front and back sides of the material to be heated.
申请公布号 JPS6060712(A) 申请公布日期 1985.04.08
申请号 JP19830169986 申请日期 1983.09.13
申请人 NICHIDEN KIKAI KK 发明人 NISHIMURA HIROSHI;MAKINO SHIGEZOU
分类号 H01L21/20;H01L21/26 主分类号 H01L21/20
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