| 摘要 |
PURPOSE:To enhance the vibration-resisting property as well as to improve the laser output power of the titled device by a method wherein a blower is arranged in the direction in which it is orthogonally intersecting with the longitudinal direction of a discharge tube, and the blower and the discharge tube are interconnected. CONSTITUTION:The lower end face of a discharge part main body 5 is brought comes in contact with a sliding roller 3, and the expansion and contraction of the discharge part main body 5 in longitudinal direction generated by the thermal stress are absorbed. An upper discharge tube 6 and a lower discharge tube 7 are arranged in the discharge part main body, mixed gas 16 flows from the cathode 13 to the anode 14 located in both discharge tubes and it is circulated between the discharge tubes 6 and 7 and a cooling path 20. The cooling path 20 is composed of vertical cooling tubes 21A-21C and the horizontal cooling tubes 22A-22C which are extending in the orthogonal direction and interconnecting with said horizontal cooling tubes, and the left and right cooling tubes 22A, 22B and one end of the center horizontal cooling tube 22C are interconnected to a heat exchager 24 and a blower 25 through the intermediary of a bellows 23. A centrifugal blower is used in the blower 25, and the blower 25 is connected to a driving motor 28 through the intermediary of a shaft 27. When the driving motor 28 is driven, the mixed gas 16 is circulated between the discharge tubes 6 and 7 and the cooling path 20 along the direction shown by the arrows in the diagram. |
