| 摘要 |
PURPOSE:To enhance the work efficiency at a station by providing a transferring mechanism which automatically takes up or puts down a semiconductor substrate container from or into a conveying carriage. CONSTITUTION:A conveying carriage 22 goes into or comes out of a station 20 along a conveying rail 21. On both sides of the station 20, a loading shelf 29a equipped with a plurality of shelves 29 on either one of which a box-shaped body 25 is mounted is installed in addition to an unloading shelf 29b. In front of the station 20, a transferring mechanism 30 is provided in such a manner that the mechanism 30 faces the station 20. The transferring mechanism 30 is constructed by assembling arms 30a, 30b, and 30c, for vertical, lateral, and back and forth movement respectively, into one body. And the arm 30c for back and forth movement is provided with a holding part that holds the box-shaped body 25. By using the said station provided with the transferring mechanism, working hours of a worker bound in the station can be shortened, while the work efficiency can be enhanced. |
