| 摘要 |
PURPOSE:To enable to print an image at high speed with a long useful life and a high precision, by a method wherein a resistor is divided into a high-resistance part and a low-resistance part, and the high-resistance part is treated to remove a part of a resistor film constituting the resistor. CONSTITUTION:On an insulated substrate 1 provided with a heat-accumulating glaze glass layer 2, a Ta2O5 layer is provided as an etchant-resisting undercoat layer 3. Then, a Cr-Si-O resistor film is provided as a heating resistor film by sputtering, and then a Cr layer having a thickness of 0.1mum as a diffusion barrier layer and an Al layer having a thickness of 1mum as a wiring conductor layer are sequentially provided thereon by sputtering. Thereafter, patterns are produced by photo-etching, further an SiO2 layer having a thickness of 2mum and a Ta2O5 layer having a thickness of 3mum are provided by sputtering to produce a heating resistor. |
