摘要 |
<p>A cryopump of vertically tiered individual generally conical shaped sections (28,34,44,54) with linearly increasing base diameters arranged smaller to larger base diameter as the distance increases from the coldest end (16) of elongated refrigeration source (10). Individual cryopanels (20,30,40,50) are a surface of revolution with tapered bayonet joint interlocking portions (22,32,42,52) to permit ease of assembly while maintaining good thermal contact between sections.</p> |