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发明名称
摘要
申请公布号	NL7202839(A)	申请公布日期	1972.09.07
申请号	NL19720002839	申请日期	1972.03.03
申请人		发明人
分类号	H01J29/45;H01L21/00;H01L21/316;H01L27/00;(IPC1-7):H01J29/45;H01L19/00;H01L15/00	主分类号	H01J29/45
代理机构		代理人
主权项
地址

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