| 摘要 |
PURPOSE:To attain easily formation of fine openings, and formation of electrodes and wirings to be performed following thereto at manufacture of a charged beam deflector by a method wherein grating type grooves are cut at the central part of a thin plate, a filler material is filled in the grooves thereof and the periphery, and then the thin plate is removed according to an etching process to leave only the filler material. CONSTITUTION:Grating type grooves 42 are cut at the central part of the one side surface of a mechanically processable thin plate 41, and at the same time, the peripheral part of the same one side surface is shaved off by depth the same with the grooves. Then the insides of the grooves 42 are covered with a filler material 44 and hardened. Then the surface of the filler material 44 is abraded up to expose the surface of the thin plate 41. Then the thin plate 41 is removed according to an etching process to leave only the filler material 44. Electrodes 62 are adhered to the inner faces of openings 45 formed to the filler material 44 thereof. Accordingly, formation of the fine openings, and formation of the electrodes and wirings to be performed following thereto can be attained easily. |
