发明名称 |
Wafer transforming device |
摘要 |
A wafer transforming device defines an airtight space by means of a base, a hollow case, and a diaphragm type chuck which is fixed to the upper end of the case by suction. In this space, a large number of vertically moving elements are arranged at predetermined intervals. In the state in which a wafer is held by suction by means of the chuck and in which the chuck is held in contact with the upper ends of the vertically moving elements by supplying a vacuum pressure into the space, the vertically moving elements located within a required range are selectively actuated. Thus, the chuck is pushed up, and the wafer held on the chuck by the suction is transformed into a desired state.
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申请公布号 |
US4504045(A) |
申请公布日期 |
1985.03.12 |
申请号 |
US19820434397 |
申请日期 |
1982.10.14 |
申请人 |
HITACHI, LTD. |
发明人 |
KENBO, YUKIO;AKIYAMA, NOBUYUKI;KOIZUMI, MITSUYOSHI;KUNI, ASAHIRO |
分类号 |
G03F7/20;H01L21/027;H01L21/30;H01L21/673;H05K3/00;(IPC1-7):B25B11/00 |
主分类号 |
G03F7/20 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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