发明名称 SEMICONDUCTOR INTEGRATED CIRCUIT DEVICE
摘要 PURPOSE:To enable to highly integrate a semiconductor integrated circuit device by electrically connecting the first electrode to one semiconductor region of an MISFET and employing a semiconductor substrate for the second electrode for forming a memory capacity element, thereby reducing the influence of unnecessary minority carrier. CONSTITUTION:A memory cell is specified by surrounding the periphery of a field insulating film 2 by a pair of patterns, and charge of hole to become information is, for example, stored by the first electrode 7 of a capacity element and the second electrode 4 of a capctity element at both sides of an insulating film 3 for forming a dielectric of a memory capacity element. In order to obtain charge of holes or depletion layer charge to be stored in the capacity element at both sides of the film 3, a threshold voltage higher than the operating voltage to be applied to the electrode 7 is provided near the surface of the substrate 1. The electrode 7 is provided on the film 3, the one end is electrically connected to the one semiconductor region 12 of the MISFET through a connecting hole 5 and a semiconductor region 6, thereby forming a memory capacity element C.
申请公布号 JPS6046067(A) 申请公布日期 1985.03.12
申请号 JP19830153274 申请日期 1983.08.24
申请人 HITACHI SEISAKUSHO KK 发明人 KOYANAGI MITSUMASA;SHIMIZU SHINJI
分类号 G11C11/401;H01L21/8242;H01L27/10;H01L27/108;H01L29/78 主分类号 G11C11/401
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