| 摘要 |
<p>PURPOSE:To transfer wafers safely without damaging or contaminating the wafers, and moreover to curtail the hours of transfer, and to improve efficiency of transfer by a method wherein the respectively specified table, holders, holder rotating devices, guides, supporting rack frame, guide elevator, pusher, pusher elevator, etc. are provided. CONSTITUTION:A first and a second carriers 40, 50 formed with pusher holes and wafer engaging grooves, a table 4 formed with a hole of nearly the same shape with the pusher hole, a pair of holders 1a, 1b having first main grooves 201 enabled to insert and to put in place wafers 101-103 and second main grooves 202 enabled to pass only wafers positioning at the specified pitch positions on the confronting faces thereof, holder rotating devices 8a, 8b to select the main grooves mentioned above by rotating the holders, a pair of guides 2a, 2b positioning over the holders and having third main grooves 203 on the confronting faces thereof enabled to be inserted with the wafer, a supporting rack frame to support the holders and the guides, a guide elevator to bring up and down the guides, a pusher 5 to bring up and down the wafers in the carriers, a pusher elevator, a driving device to transfer relatively the table, the supporting rack frame and the pusher, etc. are provided.</p> |
