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发明名称
SUBSTRATE WASHING DEVICE
摘要
申请公布号
JPS6043895(A)
申请公布日期
1985.03.08
申请号
JP19830152025
申请日期
1983.08.19
申请人
MATSUSHITA DENKI SANGYO KK
发明人
FUJIWARA KOUJI;KURODA KOUJI
分类号
H05K3/26;B08B3/08
主分类号
H05K3/26
代理机构
代理人
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地址
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