摘要 |
<p>PURPOSE:To improve the absolute accuracy of a resistor and temperature characteristic and to reduce the size by printing a thin film conductive paste on a substrate, baking it and then forming a film to be partly superposed with a thick film conductor pattern on the thin film for a resistor. CONSTITUTION:A silver-palladium paste is printed on an aluminum substrate 1, and baked to form a thick film conductor pattern 2. An oxygen-doped nitrided tantalum film 3 is formed on the entire surface of a structure. The film 3 is etched with a mixture solution of hydrofluoric acid, nitric acid and acetic acid so as to become part of a thick film conductor by photolithographic technique, the resistor is stabilized and heat treated, and cut at the part 4 by a laser trimming method, thereby obtaining a desired resistance value.</p> |