发明名称 MANUFACTURE OF SOLID-STATE IMAGE PICKUP ELEMENT
摘要 PURPOSE:To increase the utilization of incident beams largely, and to improve sensitivity by applying an ultraviolet-curing type resin, exposing and developing only a light-receiving section, curing a resin film remaining in the light- receiving section by a curing agent and forming a condenser lens-shaped light- transmitting filter. CONSTITUTION:A light-transmitting ultraviolet-curing type resin is applied on the whole upper surface of a color filter section 5 and dried to form an ultraviolet- curing type resin film 9, a mask 10 with patterns 10a in sections corresponding to light-receiving sections 3a-3d is arranged, only the resin films 9 on the light- receiving sections 3a-3d are exposed by ultraviolet rays 11 and cured, and resin films 9 of sections not exposed are developed and peeled and removed, and cured resin film patterns 12a are formed on a light-transmitting protective film 6c corresponding to the light-receiving sections 3a-3d. The cured resin film patterns 12a are treated by a curing agent. The patterns 12a are baked and stabilized. Accordingly, a process of application and formation-exposure-development- baking regarding said ultraviolet-curing type resin film is repeated once or plural times in response to a sensitivity rise required.
申请公布号 JPS6038867(A) 申请公布日期 1985.02.28
申请号 JP19830146307 申请日期 1983.08.12
申请人 HITACHI SEISAKUSHO KK 发明人 IZUMI AKIYA;KANESAKA KAZUMI
分类号 H01L27/14;H01L31/0216 主分类号 H01L27/14
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