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发明名称
WAFER ALIGNMENT APPARATUS
摘要
申请公布号
GB8502075(D0)
申请公布日期
1985.02.27
申请号
GB19850002075
申请日期
1985.01.28
申请人
PERKIN ELMER CORPORATION
发明人
分类号
H01L21/66;G03F9/00;H01L21/67;H01L21/68;H01L21/822;H01L27/04
主分类号
H01L21/66
代理机构
代理人
主权项
地址
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