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发明名称
摘要
申请公布号
JPS537277(B2)
申请公布日期
1978.03.16
申请号
JP19730078636
申请日期
1973.07.11
申请人
发明人
分类号
H01L21/31;H01L33/14;H01L33/30;H01S5/00
主分类号
H01L21/31
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