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发明名称
DEVICE FOR THE PULSED ELECTRON BEAM PROCESSING OF A SPECIMEN
摘要
申请公布号
EP0064003(B1)
申请公布日期
1985.02.20
申请号
EP19820400708
申请日期
1982.04.20
申请人
COMMISSARIAT A L'ENERGIE ATOMIQUE ETABLISSEMENT DE CARACTERE SCIENTIFIQUE TECHNIQUE ET INDUSTRIEL
发明人
BRUEL, MICHEL;FLOCCARI, MICHEL;MICHAUD, JEAN-FRANCOIS
分类号
H01J37/305;H01L21/265;H01J37/24;(IPC1-7):H01J37/305
主分类号
H01J37/305
代理机构
代理人
主权项
地址
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