| 摘要 |
PURPOSE:To obtain a device, which can be exchanged simply while also fitting to automatic conveyance when substrates having different size and thickness are mounted and fixed by providing a sucking means to a holder so that air is discharged in order to suck the substrate to the holder under a vacuum from a connecting section with a carrier means for the holder. CONSTITUTION:Air is discharged from both suctions holes 100c, 100d for an arm 100 for suction under a vacuum under the state in which a holder 7 is placed on the arm 100. Consequently, the inside of a notch section 75d in the holder 7 is sucked under the vacuum by a groove 100a, the arm 100 and the holder 7 are fixed, and a positional displacement is not generated during conveyance. Since the recessed section 100b of the arm 100 is opposed and connected to the hole 72 of the holder 7, a groove 70b in a sucking surface 70 is exhausted through a ventilating hole 71 in the holder 7, and a glass substrate 6 is sucked and fastened to the holder 7 by the groove 70b. When the size of the substrate 6 changes, the holder corresponding to the size of the substrate is prepared, but the size of the holder 7 and a sucking plate 75 need not be altered, the size of the sucking surface 70 of the surface of the holder 7 is varied, and the position of a suction hole 70d may be changed in the direction along the ventilating hole 71. |
