| 摘要 |
PURPOSE:To prepare a carbon film like diamond, having low hydrogen content, by irradiating a mixed gas of hydrocarbon and H2 with microwave at low pressure so that it is made into plasma. CONSTITUTION:The space between the reaction pipe 4 having the support 2 placing the substrate 1 and the gas bomb 13 is evacuated in high vacuum by the vacuum pump 10, and the substrate 1 is heated to 500-1,100 deg.C. A mixed gas of a hydrocarbon gas and a H2 gas in a blending ratio of 0.001-1.0(vol/vol) is introduced from the bomb 13 through the flowmeter 15 and the gas inlet 5 to the reaction pipe 4 at 0.1-150Torr at >=1ml/min flow rate, the gas is irradiated with the microwave 9 having >=10W from the magnetron 7 through the waveguide 6, plasma is generated, so that a carbon film like transparent diamond is formed on the substrate 1. |
