发明名称 SEMICONDUCTOR INTEGRATED CIRCUIT DEVICE
摘要 PURPOSE:To obtain a large capacitance value by a method wherein a plurality of conductive wirings are arranged on a semiconductor chip in proximity to each other, which are then covered with an insulation film. CONSTITUTION:Arranged at small intervals between each other, a plurality of the conductive wirings 12 forming electrodes opposed to each other are provided on the semiconductor chip 1. The insulation film 13 forming a dielectric covers the wirings 12. Thereby, the large capacitance value can be obtained with a pair of the wirings 12 as responding electrodes and the film 13 as the dielectric. It is sufficient to increase the height and the length of the wiring 12, and then to reduce the interlinear distance, in order to increase the capacitance value. Thus, the large capacitance value can be obtained without the increase of chip area.
申请公布号 JPS6027158(A) 申请公布日期 1985.02.12
申请号 JP19830137099 申请日期 1983.07.25
申请人 MITSUBISHI DENKI KK 发明人 TAKIMOTO ISAO
分类号 H01L21/822;H01L27/04;(IPC1-7):H01L27/04 主分类号 H01L21/822
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