| 摘要 |
PURPOSE:To set the pattern formed on the part having a difference of surface level to the equal thickness and remove the malfunction of the babble by means of the stretcher pattern formed at a part having a difference of surface level, and the trouble to avoid the part having difference of surface level, by smoothening the part having a difference of surface level of an SiO2 insulation layer a resin insulation layer. CONSTITUTION:An SiO2 insulation layer 33 formed on an LPE film 32 of a garnet is stuck at an equal thickness, and an area 33a in which a detector pattern 35 is formed is removed by the etching means. For preparing a resin insulation layer 34 covering the insulation layer 33, the liquid silicone thermosetting resin is spin-coated, after that, it is set by heating. However, the thickness of the insulation layer 34, which will occupy the area 33a forming the detector pattern, is the one needed to separate the LPE film 32 from a detector pattern 35. Next, the detector pattern 35, a stretcher pattern 36, etc., are formed on the insulation layer 34. Since the insulation layer 34 covering the part having a difference of surface level of the insulation layer 33 becomes a smooth slope, the pattern 36, in which the pattern is formed on the difference in level, becomes to have an almost equal thickness. |
